Silicon Thermal Flow-Sensor Semi-ideal Model

نویسندگان

چکیده

Abstract A so-called semi-ideal model has been derived for a pulse-operated MEMS thermal flow sensor by reciprocal numerical mapping of the ideal an instantaneous line heat source to experimental data sensor. The novel not only applies as precise potential working equation but also provides insight into complete signal transmission chain from heater thermometers It gives answers prominent peculiarities actual path sensor, prepares ways improve its design, and offers guidance better control measuring process. was in order replace so far utilized empirical relations that require multiple calibration measurements. found out transient temperature profile response electrical pulse is substantially shaped series conduction heat. Moreover, it demonstrated impact mass (practical) on released enthalpy can be modeled considering virtual cylinder surrounding source. same analytical technique stations. findings study primarily concern Nevertheless, presented simple method effective tool mathematical modeling means analysis function evaluation. concept help dynamics practical pulsed heating.

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ژورنال

عنوان ژورنال: International Journal of Thermophysics

سال: 2022

ISSN: ['1572-9567', '0195-928X']

DOI: https://doi.org/10.1007/s10765-022-02979-1